| 摘要 |
A method for manufacturing an acoustic mirror and a method for manufacturing a piezoelectric resonator are provided to minimize excitation of a vibration mode by obtaining uniform layer distribution in the mirror. A method for manufacturing an acoustic mirror includes the steps of: generating a first layer(106b1,106b2) of a layer alignment; generating a second layer(106a1,106a2) on the first layer(106b1,106b2) to cover the first layer(106b1,106b2) partially; spreading a planarization layer(132) on the first layer(106b1,106b2) and the second layer(106a1,106a2); exposing a region of the second layer(106a1,106a2), wherein the exposed region of the second layer(106a1,106a2) is related to an active region of a piezoelectric resonator; and planarizing a structure by removing at least a part of the planarization layer(132) which remains outside the exposed region of the second layer(106a1,106a2). |
