Biological sensing structures

摘要

A biological sensing structure includes a mesa integrally connected a portion of a substrate, wherein the mesa has a top surface and a sidewall surface adjacent to the top surface. The biological sensing structure includes a first light reflecting layer over the top surface and the sidewall surface of the mesa. The biological sensing structure includes a filling material surrounding the mesa, wherein the mesa protrudes from the filling material. The biological sensing structure includes a stop layer over the filling material and a portion of the first light reflecting layer. The biological sensing structure includes a second light reflecting layer over a portion of the stop layer and a portion of the top surface of the mesa. The biological sensing structure includes an opening in the second light reflecting layer to partially expose the top surface of the mesa.

主权项

1. A biological sensing structure, comprising:
a mesa integrally connected a portion of a substrate, wherein the mesa has a top surface and a sidewall surface adjacent to the top surface; a first light reflecting layer disposed over the top surface and the sidewall surface of the mesa; a filling material surrounding the mesa, wherein the mesa protrudes from a top surface of the filling material; a stop layer disposed over the filling material and a portion of the first light reflecting layer; a sacrificial layer disposed over a first portion of the stop layer and exposing a second portion of the stop layer; a second light reflecting layer disposed over the second portion of the stop layer and a portion of the top surface of the mesa; and an opening disposed in the second light reflecting layer to partially expose the top surface of the mesa.