发明名称
摘要 A lens element, for use in a projection system, includes a concave side. The lens element further includes a membrane and a nozzle, the membrane at least covering the concave side of the lens element. The nozzle is arranged for supplying and/or removing a liquid and/or a gas in between the concave side and the membrane.
申请公布号 JP4638897(B2) 申请公布日期 2011.02.23
申请号 JP20070164949 申请日期 2007.06.22
申请人 发明人
分类号 H01L21/027;G02B3/12;G02B21/00 主分类号 H01L21/027
代理机构 代理人
主权项
地址