SUBSTRATE TRANSPORTING STAGE, SCRIBING APPARATUS COMPRISING THE SAME AND METHOD FOR TRANSPORTING SUBSTRATE

摘要

The present invention relates to a substrate transporting stage to prevent damage to a substrate transported on a stage, a scribing apparatus comprising the same, and a method for transporting a substrate. According to the present invention, the substrate transporting stage comprises: a stage; an electric charge prevention belt; and a first stage and a second stage.