发明名称 |
SEMICONDUCTOR PROCESSING TAPE |
摘要 |
[Problem] To provide a semiconductor processing tape which has a low thermal shrinkage rate and is not subject to wrinkles because the tape shrinks uniformly regardless of tape direction, and in which kerf width extends uniformly without displacement of chip position. [Solution] Provided is a semiconductor processing tape that is characterized in that the thermal shrinkage rate in both the length direction and width direction of the tape when heated for 10 seconds at 100 °C is 0-20%, inclusive, and when the thermal shrinkage rate in either the length direction or the width direction is 0.1% or more, the thermal shrinkage rate in the length direction/the thermal shrinkage rate in the width direction = 0.01-100, inclusive. (Shrinkage rate = (dimensions before heating - dimensions after heating)/dimensions before heating ×100(%)) |
申请公布号 |
WO2016152957(A1) |
申请公布日期 |
2016.09.29 |
申请号 |
WO2016JP59313 |
申请日期 |
2016.03.24 |
申请人 |
FURUKAWA ELECTRIC CO.,LTD. |
发明人 |
SANO, Toru;SUGIYAMA, Jirou;AOYAMA, Masami |
分类号 |
H01L21/301;C09J7/02;H01L21/683 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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