| 发明名称 |
MANUFACTURING METHOD OF METAL MASK AND MASK FOR DEPOSITION USING THEREOF |
| 摘要 |
A mask manufacturing method, including manufacturing a first mold, including forming first patterns having inclined surfaces by patterning a silicon substrate; manufacturing a second mold, including forming second patterns that correspond to the first patterns by coating and curing a hardener on a surface of the first mold in which the first patterns are formed; separating the second mold from the first mold; forming a mask pattern by coating a metal layer on the second mold; and separating the metal layer from the second mold. |
| 申请公布号 |
US2016289854(A1) |
申请公布日期 |
2016.10.06 |
| 申请号 |
US201514864924 |
申请日期 |
2015.09.25 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
HAN Jeong Won |
| 分类号 |
C25D1/10;B05C21/00;B05B15/04 |
主分类号 |
C25D1/10 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A mask manufacturing method, comprising:
manufacturing a first mold, including forming first patterns having inclined surfaces by patterning a silicon substrate; manufacturing a second mold, including forming second patterns that correspond to the first patterns by coating and curing a hardener on a surface of the first mold in which the first patterns are formed; separating the second mold from the first mold; forming a mask pattern by coating a metal layer on the second mold; and separating the metal layer from the second mold. |
| 地址 |
Yongin-si KR |
