物体交換システム、露光装置、フラットパネルディスプレイの製造方法及びデバイス製造方法

摘要

PROBLEM TO BE SOLVED: To replace a substrate on a substrate stage quickly.SOLUTION: A substrate stage 20a floats a substrate Pby jetting pressurized gas from a substrate holder 30a, and a substrate carrying-out device 93 carries out the substrate Pfrom the substrate holder 30a by moving the substrate Palong a horizontal plane by using the top face (substrate mounting surface) of the substrate holder 30a as a guide surface. Another substrate Pto be exposed next is waiting above the substrate holder 30a when the substrate Pis carried out, and delivered to substrate lift devices 46a of the substrate stage 20a upon finishing the carrying-out operation of the substrate P.