| 发明名称 | Composition for ferroelectric thin film formation, method for forming ferroelectric thin film, and ferroelectric thin film formed by the method thereof | ||
| 摘要 | Disclosed is a composition for ferroelectric thin film formation which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT. The composition for ferroelectric thin film formation is a liquid composition for the formation of a thin film of a mixed composite metal oxide formed of a mixture of a composite metal oxide (A) represented by general formula (1): (PbxLay)(ZrzTi(1-z))O3 [wherein 0.9<x<1.3, 0≦y<0.1, and 0≦z<0.9 are satisfied] with a composite oxide (B) or a carboxylic acid (B) represented by general formula (2): CnH2n+1COOH [wherein 3≦n≦7 is satisfied]. The composite oxide (B) contains one or at least two elements selected from the group consisting of P (phosphorus), Si, Ce, and Bi and one or at least two elements selected from the group consisting of Sn, Sm, Nd, and Y (yttrium). | ||
| 申请公布号 | US9502636(B2) | 申请公布日期 | 2016.11.22 |
| 申请号 | US201414448224 | 申请日期 | 2014.07.31 |
| 申请人 | MITSUBISHI MATERIALS CORPORATION | 发明人 | Fujii Jun;Sakurai Hideaki;Noguchi Takashi;Soyama Nobuyuki |
| 分类号 | H01L41/318;H01L41/187;C04B24/40;C04B24/42;C04B35/624;H01L41/18;B05D3/02;B05D3/04;C01G25/00;C23C18/12;H01G4/12;H01G4/20;H01L21/02;H01L21/316;H01L49/02;C04B35/491;C04B35/493;C04B35/632;H01B3/14;C23C30/00;H01L27/108;C04B111/92;H01L27/115 | 主分类号 | H01L41/318 |
| 代理机构 | Locke Lord LLP | 代理人 | Locke Lord LLP ;Armstrong, IV James E.;Tabarovsky Julie |
| 主权项 | 1. A composition for the formation of a ferroelectric thin film which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT, wherein the composition is a liquid composition for the formation of a thin film of a composite metal oxide formed of a mixture of a composite metal oxide A represented by the general formula (1): (PbxLay)(ZrzTi(1-z))O3 [In the formula (1), 0.9<x<1.3, 0≦y<0.1, and 0≦z<0.9] with a carboxylic acid B which is represented by the general formula (2): CnH2n+1COOH (wherein 3≦n≦7) and capable of taking the structure of the following general Chemical Formula (3) upon coordination with the metal element of the composite metal oxide A, the composition comprising an organometallic compound solution wherein a raw material of the composite metal oxide A, and the carboxylic acid B are dissolved in an organic solvent in such a manner that the molar ratio B/A of the carboxylic acid B to the composite metal oxide A is in the range of 0<B/A<0.2, wherein a pseudo-carboxylate in which the carboxylic acid B is coordinated to the metal element of the composite metal oxide A takes a structure of a 6-membered ring by an action of a hydrogen bond [in the Chemical Formula (3), within the range satisfying “n” of the general formula (2): CnH2n+1 COOH, R1, R2, R3, R4, R5, and R6 represent hydrogen, a methyl group or an ethyl group, M represents Pb, La, Zr or Ti, and m represents a valence of M]. | ||
| 地址 | Tokyo JP | ||