Schottky clamped radio frequency switch

摘要

Various methods and devices that involve radio frequency (RF) switches with clamped bodies are provided. An exemplary RF switch with a clamped body comprises a channel that separates a source and a drain. The RF switch also comprises a clamp region that spans the channel, extends into the source and drain, and has a lower dopant concentration than both the source and drain. The RF switch also comprises a pair of matching silicide regions formed on either side of the channel and in contact with the clamp region. The clamp region forms a pair of Schottky diode barriers with the pair of matching silicide regions. The RF switch can operate in a plurality of operating modes. The pair of Schottky diode barriers provide a constant sink for accumulated charge in the clamped body that is independent of the operating mode in which the RF switch is operating.

主权项

1. A radio frequency switch with a clamped body comprising:
a channel that separates a source and a drain; a clamp region that spans the channel, extends into the source and drain, and has a lower dopant concentration than both the source and drain; and a pair of matching silicide regions formed on either side of the channel and in contact with the clamp region; a matching clamp region that spans the channel; wherein the matching clamp region and the clamp region are spaced apart by less than 20 microns; wherein the matching clamp region and the clamp region are at least 0.2 microns wide along the overall width of the channel and wherein the clamp region forms a pair of Schottky diode barriers with the pair of matching silicide regions.