Ultraviolet systems and methods for irradiating a substrate

摘要

A UV system for irradiating a substrate includes a lamphead having an enclosure with an interior. A UV bulb is positioned in the interior and is capable of emitting UV energy when excited by RF energy. The UV system also includes a solid state RF source capable of generating the RF energy. The RF energy is transmitted to the UV bulb, which causes the UV bulb to ignite and emit the UV energy from the interior of the lamphead.

主权项

1. A UV system for irradiating a substrate, the system comprising:
a lamphead including an interior; a plurality of solid state RF sources, each RF source configured to generate RF energy; an elongated UV bulb having a length and being positioned in said interior of said lamphead and capable of emitting UV energy when excited by the RF energy generated by said plurality of solid state RF sources; and a plurality of RF transmitters, each one of said plurality of RF transmitters coupled to one of said plurality of solid state RF sources, said plurality of RF transmitters being positioned proximate to said elongated UV bulb and spaced apart along the length of said elongated UV bulb, and said plurality of RF transmitters configured to receive the RF energy from said plurality of solid state RF sources and direct the RF energy to different regions across the length of said elongated UV bulb.