VACUUM ULTRVIOLET LIGHT SOURCE,申请号JP19980159814-传众专利搜索

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发明名称	VACUUM ULTRVIOLET LIGHT SOURCE
摘要
申请公布号	JPH11317204(A)	申请公布日期	1999.11.16
申请号	JP19980159814	申请日期	1998.05.01
申请人	SASAKI WATARU;KUBODERA SHOICHI;KAWANAKA JUNJI;MIYAZAKI PREFECTURE;HINODE SANSO KK;KATADA TEKKOSHO:KK;YASUI KK;HANABISHI TOSO GIKEN KOGYO:KK;SAN DENSHI KOGYO KK;KIYOMOTO IRON & MACHINERY WORKS CO LTD	发明人	SASAKI WATARU;KUBODERA SHOICHI;KAWANAKA JUNJI
分类号	H01J65/04;H01J65/00;(IPC1-7):H01J65/04	主分类号	H01J65/04
代理机构		代理人
主权项
地址

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