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经营范围
发明名称
CHARGED PARTICLE BEAM EXPOSURE DEVICE
摘要
申请公布号
JPH11317186(A)
申请公布日期
1999.11.16
申请号
JP19980134231
申请日期
1998.04.30
申请人
NIKON CORP
发明人
SHIMIZU HIROYASU
分类号
G03F7/20;H01J37/141;H01J37/305;H01L21/027;(IPC1-7):H01J37/141
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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