SUBSTRATE SUPPORT MEMBER WITH A PURGE GAS CHANNEL AND PUMPING SYSTEM,申请号KR1020007014654-传众专利搜索

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发明名称	SUBSTRATE SUPPORT MEMBER WITH A PURGE GAS CHANNEL AND PUMPING SYSTEM
摘要
申请公布号	KR20010034921(A)	申请公布日期	2001.04.25
申请号	KR1020007014654	申请日期	2000.12.22
申请人		发明人
分类号	C23C16/44	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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