| 摘要 |
PROBLEM TO BE SOLVED: To provide substrate treatment equipment by which a piping diameter for discharging a treatment is lowered and a waste-fluid installation space on the factory side can be reduced. SOLUTION: Connecting pipes 30b, 30d and 30e have on-off valves 31b, 31d and 31e, respectively; and connect discharge openings 21b, 21d and 21e in treatment tanks 20b, 20d and 20e, with pure water stored, and inflow ports 41b, 41d and 41e in a waste-fluid tank 40. A waste-fluid pipe 50 has the on-off valve 51, and connects the discharge opening 42 in the tank 40 and the waste-fluid pipe 60 in a factory. The on-off valves 31b, 31d and 31e in the connecting pipe 30 and the on-off valve 51 in the waste-fluid pipe 50 are constituted so that their opening and closing are controlled while being mutually delayed by a control unit as a control means in the substrate treatment equipment. COPYRIGHT: (C)2005,JPO&NCIPI
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