| 摘要 |
By using a semiconductor single crystal pulling apparatus for growing single crystals by the Czochralski method while rotating the melt by a magnetic field and electric current, namely by the EMCZ method, which comprises a main pulling means (14) for pulling a single crystal, a holding mechanism for gripping an engaging stepped portion formed on the single crystal through engaging members (17) and a sub pulling means (15) for moving the holding mechanism up and down and in which an electric current is passed through the main pulling means (14) and through the sub pulling means (15), it is possible to prevent heavy single crystals from undergoing a falling accident and, at the same time, effectively reduce the power consumption. In this pulling apparatus, it is effective to feed an electric current to the sub pulling means (15) alone and it is desirable to dispose two or more electrodes (22) whether the pulling means is of a shaft type or wire type. <IMAGE> |
