| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and system for detecting contaminants that can precipitate and deposit on a workpiece during a carbon dioxide application, especially, contaminants that are present already and are dissolved in the fresh carbon dioxide supplied to the application. SOLUTION: The method of monitoring contaminants dissolved in a carbon dioxide stream to the workpiece includes the steps of sampling at least a portion of the carbon dioxide stream, modifying the conditions of the carbon dioxide sample for forming an aerosol that includes gaseous carbon dioxide and precipitating contaminants, and detecting the number of particles in a portion with at least a single particle counter. This value is compared with the reference value, the subsequently derived number of dissolved particles that precipitate from the carbon dioxide and deposit on the workpiece is determined as being allowably small, and the contaminants in the carbon dioxide stream are monitored. COPYRIGHT: (C)2008,JPO&INPIT
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