Wet-strippable silicon-containing antireflectant

摘要

Wet-strippable antireflective compositions comprising one or more silicon-containing polymers that are free of Q-monomers and hydridosilanes as polymerized units are provided. These compositions are useful in the manufacture of various electronic devices.

主权项

1. The present invention provides a siloxane polymer comprising as polymerized units one or more first monomers of formula (1) or dimers thereof and one or more second monomers of formula (2) or dimers thereof
R2SiX2  (1) RSiX3  (2) wherein each R is independently chosen from aryl, aralkyl, alkyl, alkenyl, aralkenyl, and R1; R1 is a C2-30 organic radial comprising one or more —C(O)—O—C(O)— moieties; and each X is a hydrolyzable moiety; wherein at least one R is R1; and wherein ≧30% of the monomers comprising the polymer comprise one or more functional moieties chosen from hydroxy, mercapto, epoxy, glycidyloxy, cyano, alkyleneoxy, sulfolanyl, and —C(O)—O—C(O)—; and wherein the polymer is free of monomers of the formula HSiX3 and SiX4 as polymerized units.