| 摘要 |
PROBLEM TO BE SOLVED: To provide a disposed substrate re-input preventing system capable of preventing re-input of a disposed substrate into a production line.SOLUTION: A disposed substrate re-input preventing system 8 comprises: an extraction unit 2D which extracts a substrate with ID marks from a production line 9; re-input units 2D, 6U which re-input the extracted substrate into the production line 9; ID mark reading units 4D, 7U which are arranged in the re-input units 2D, 6U, and read the ID marks of the substrate; and a control device 5 including an input unit 52 into which disposal information is input when the extracted substrate is determined to be disposed, a storage unit 50 which stores information related to the ID marks of the substrate in association with the disposal information, and an operation unit 51 which collates the ID marks assigned to the substrate with information related to the ID marks stored in the storage unit 50 when the substrate is re-input to the production line 9 from the re-input units 2D, and 6U, and inhibits the re-input of the substrate when the ID marks assigned to the substrate match the information related to the ID marks stored in the storage unit 50, and the matching ID marks are associated with the disposal information.SELECTED DRAWING: Figure 9 |
