Substrate holders having support plates for mounting of substrates are disclosed. The substrate holders use a combination of spring clamping elements and pins to grip the substrates. The substrate edge contact height of the spring clamping elements and pins may be selected such that upper portions of the side edges of the substrates are substantially unobstructed, allowing coating to be applied to upper surfaces and upper portions of the side edges of the substrates contemporaneously.
申请公布号
WO2016172443(A1)
申请公布日期
2016.10.27
申请号
WO2016US28795
申请日期
2016.04.22
申请人
CORNING INCORPORATED
发明人
BOUGHTON, Daniel Robert;FAGAN, James Gerard;MEBERT, Valerie Elise;MORGAN, Kenneth Spencer