Microelectrochemical sensor and method for operating a microelectrochemical sensor

摘要

A microelectrochemical sensor includes a carrier material composed of a semiconductor substrate, and includes a chemosensitive sensor element. The chemosensitive sensor element is positioned in a first partial region of the carrier material. A heating element is positioned in a region of the chemosensitive sensor element and is configured to regulate a temperature of the chemosensitive sensor element. A microelectronic unit is positioned in a second partial region of the carrier material, and is connected to the chemosensitive sensor element and the heating element via conductor tracks integrated into the carrier material. The microelectronic unit is configured to operate the heating element and the sensor element.

主权项

1. A method of using a microelectrochemical sensor, comprising:
supplying a heating voltage using a sensor bus; applying the heating voltage to a heating element via a microelectronic unit, wherein the heating element is configured to regulate a temperature of a chemosensitive sensor element including a thin-film membrane having a respective electrode on each side, the respective electrode permeable for a species to be measured; detecting a sensor signal at the chemosensitive sensor element using the microelectronic unit, wherein the sensor signal corresponds to at least one concentration of a chemical species at the chemosensitive sensor element; and determining a bus signal for provision on the sensor bus using the microelectronic unit, and based at least in part upon the sensor signal and electrical energy from the sensor bus.