发明名称 |
THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREFOR, ARRAY SUBSTRATE AND DISPLAY DEVICE |
摘要 |
A thin film transistor and a manufacturing method therefor, an array substrate and a display device. The manufacturing method comprises a step of forming a low-temperature polycrystalline silicon active layer. A substrate has a first region (101) and a second region (102). The step comprises: forming a buffer layer (20) on the first region (101) and the second region (102) of the substrate (10), the thickness of the buffer layer (20) corresponding to the first region (101) being greater than the thickness of the buffer layer (20) corresponding to the second region (102); or forming a buffer layer (20) on the first region (101) of the substrate (10); forming an amorphous silicon layer (30) on the buffer layer (20); performing laser crystallization on the amorphous silicon layer (30) to convert the amorphous silicon layer (30) into a polycrystalline silicon layer (40); removing the polycrystalline silicon layer (40) on the second region (102), so as to form the low-temperature polycrystalline silicon active layer (01) on the first region (101). |
申请公布号 |
WO2016202062(A1) |
申请公布日期 |
2016.12.22 |
申请号 |
WO2016CN78844 |
申请日期 |
2016.04.08 |
申请人 |
BOE TECHNOLOGY GROUP CO., LTD. |
发明人 |
WANG, Zuqiang;LIU, Chien Hung |
分类号 |
H01L21/336;H01L29/786 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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