发明名称 Linear motor, and stage apparatus and exposure apparatus using the same
摘要 In order to provide a good linear motor device which can enjoy low cost and high driving power but has small thrust ripples, in a linear motor in which permanent magnets move relative to a coil, a plurality of permanent magnets are arranged along the moving direction while rotating their polarity directions 90 DEG each in turn to generate a sine magnetic field. Each permanent magnet has a simple rectangular parallelopiped shape, and two or more coils of a polyphase coil are simultaneously energized.
申请公布号 US6025658(A) 申请公布日期 2000.02.15
申请号 US19970845884 申请日期 1997.04.28
申请人 CANON KABUSHIKI KAISHA 发明人 KAMATA, SHIGETO
分类号 B65G54/02;G03F7/20;H01L21/68;H02K41/03;(IPC1-7):H02K41/00 主分类号 B65G54/02
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