| 摘要 |
PROBLEM TO BE SOLVED: To provide a treating liquid preparation device in which the prescribed quantity of chemical liquid can be fed with high accuracy to a weighing tank. SOLUTION: This preparation device in which chemical liquid is diluted with dilution liquid to prepare treating liquid is provided with a weighing tank 18 which has a manifold 17 and into which chemical liquid is fed through the manifold, a first feeding hole made in the manifold and for feeding the chemical liquid along the peripheral direction of the inner surface of the manifold, an upper limit detection sensor 27 installed in the weighing tank and for detecting the level of the chemical liquid fed through the manifold, and a preparation tank 16 for mixing the chemical liquid weighed by the weighing tank with the dilution liquid.
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