| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating device of a workpiece drying chamber capable of improving heat transfer efficiency without independently mounting a heating source device for heating a heater, at the outside of the workpiece drying chamber. SOLUTION: This heating device comprises a vapor generator for producing solvent vapor, the workpiece drying chamber, and the heater for heating the workpiece drying chamber. A feeding pipe for feeding the solvent vapor from the vapor generator to the workpiece drying chamber is arranged and connected through a valve, a suction pipe is arranged and connected with the workpiece drying chamber through a valve, a vacuum pump is installed to apply vacuum in the workpiece drying chamber through the suction pipe, further a liquid drain pipe is arranged and connected near a bottom portion of the workpiece drying chamber through a valve, a remaining liquid receiver is mounted through the liquid drain pipe, the feeding pipe for feeding the solvent vapor from the vapor generator to the heater is arranged and connected through a valve, and a return pipe for returning the cooled vapor from the heater to the vapor generator is arranged and connected through a valve. COPYRIGHT: (C)2007,JPO&INPIT
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