| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a thin-film element in which a metal oxide film of a (100) orientation can be easily formed. <P>SOLUTION: The method of manufacturing the thin-film element includes a step of forming a titanium oxide film 16 on the upper part of a base by a method of applying a titanium compound solution, a step of forming a Pt-based lower electrode film 20 on the upper part of the titanium oxide film 16, and a step of forming a metal oxide film 22 containing at least any one of a lead titanate and a lead zirconate on the upper part of the Pt-based electrode film 20. <P>COPYRIGHT: (C)2007,JPO&INPIT |
