| 摘要 |
#CMT# #/CMT# The testing device has two holding devices (1a, 1b) for accommodating an electronic component i.e. wafer. A transporting device (3) moves the holding devices from an assembling position to a measuring position. A measuring device determines preset characteristics of the electronic component. The holding devices are arranged in the measuring position on cross tables (2a, 2b). An orientation unit (4) with a device for optical position determination is arranged at the assembling position. The holding device is formed as a vacuum clamping system. #CMT# : #/CMT# An independent claim is also included for a method for determining preset characteristics of an electronic component. #CMT#USE : #/CMT# Testing device for determining preset characteristics of an electronic component i.e. wafer (claimed). #CMT#ADVANTAGE : #/CMT# The testing device accommodates the circuit that is to be tested in the holding device and temporally contacts with the measuring device, thus testing entire production or samples of the production for malfunctioning before processing or delivering the components to the customers. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a perspective view of a testing device with a rotary transporting device. 1a, 1b : Holding devices 2a, 2b : Cross tables 3 : Transporting device 4 : Orientation unit 6 : Bearing. |
