| 摘要 |
A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system further comprising a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas by integrating the pressure values measured by the pressure sensor to calculate a pressure integrated value and comparing the pressure integrated value with the benchmark when the process gas is supplied to the flow control device through the first cutoff valve, controlled in a flow rate by the flow control device, and supplied to the pressure sensor.
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