发明名称 SURFACE TREATMENT SYSTEM OF NANO-POWDER USING ATMOSPHERIC PLASMA
摘要 A plasma surface processing device of a nano powder is provided to prevent lump of the nano powder by independently separating the nano powder. A space part is formed inside a housing(100). A plasma generating unit(200) is formed in the outer side of the housing. The plasma generating unit generates the plasma due to reactive gas in the space part. A gas supply unit(300) is coupled with the lower part of the housing and supplies the reactive gas or plasma to the space part. A powder blocking unit(400) is formed in the space part. The powder blocking unit has a conical bamboo rain-hat shape and blocks the flow of the nano powder upward. A support unit(500) is coupled with the inner wall of the housing and is vertically formed in the center of the space part. The support part is coupled with the powder blocking unit. An exhaust unit(600) is formed in the upper part of the housing. The exhaust unit exhausts the reactive gas by separating the reactive gas and the nano powder.
申请公布号 KR20090063538(A) 申请公布日期 2009.06.18
申请号 KR20070130935 申请日期 2007.12.14
申请人 PUSAN NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION 发明人 CHO, CHAE RYONG;JEONG, SE YOUNG
分类号 H01L21/3065 主分类号 H01L21/3065
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