METHOD OF MANUFACTURING INKJET PRINTHEAD

摘要

PURPOSE: A manufacturing method for an inkjet print head is provided to form uniform thickness of nozzle layer above sacrificial and chamber layers by making the top surfaces of the sacrificial and chamber layers flat. CONSTITUTION: A manufacturing method for an inkjet print head comprises the steps of: forming a chamber layer(120) having an ink chamber on a substrate(110), forming a sacrificial layer(125) including water soluble polymer on the chamber layer, flattening the top surfaces of the sacrificial and chamber layers through chemical-mechanical polishing, forming a nozzle layer having a nozzle on the sacrificial and chamber layers, forming an ink feed hole for ink supply on the substrate, and removing the sacrificial layer.