| 摘要 |
PROBLEM TO BE SOLVED: To provide a pellicle frame having high durability against light exposure, the pellicle frame simultaneously satisfying a plurality of requirement such as high rigidity and durability, and high rigidity and suppression of powder dust.SOLUTION: A pellicle frame formed into a predetermined frame shape is composed of a sintered body having a Young's modulus of 150 GPa and Vickers hardness of 800 or more. The arithmetic average roughness Ra of at least one side of the front and rear sides is 0.1-0.4 μm. By using a sintered body, the pellicle frame has high durability and appropriate surface roughness so that fine powder can be suppressed from generating in use.SELECTED DRAWING: Figure 5 |
