发明名称 COATED GRAPHITE MEMBER
摘要 PROBLEM TO BE SOLVED: To provide a coated graphite member in which a pressure difference between the inside and the outside of a coated film is hard to occur under a reduced pressure and under a vacuum state, which is strong in thermal shock, and in which exfoliation of the coated film is hard to occur, in a coated graphite member coated with PBN, PG, SiC, TaC and the like.SOLUTION: The coated graphite member is formed by coating a surface of a graphite base material 2 with a different material such as PBN, SiC, TaC. In the coated graphite member, the graphite base material 2 is partly exposed. An exposed part of the graphite base material 2 has a counterbored hole 4 or a screw hole 5 shape having a recessed shape with respect to the surface of the base material 2, and has preferably an area of 1-1,200 mm. The exposed part of the graphite base material 2 is disposed at a place where the temperature becomes not higher than 1,500°C and at a place where the exposed part is not brought into contact with a gas corrosive to graphite.SELECTED DRAWING: Figure 1
申请公布号 JP2016199419(A) 申请公布日期 2016.12.01
申请号 JP20150079769 申请日期 2015.04.09
申请人 SHIN ETSU CHEM CO LTD 发明人 KANO MASAKI
分类号 C04B41/87;C23C16/34 主分类号 C04B41/87
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