Pressure sensor having multiple piezoresistive elements

摘要

A pressure sensor includes: a sensor section having one fixed end and first to four gauge resistors arranged on a diaphragm; and a support member fixing the sensor section. A first pair to fourth pair of piezoresistive elements are arranged on the diaphragm. Two piezoresistive elements of each pair have opposite resistance value change directions, and distances to the support member are equal to each other. A distances between each piezoresistive element of the third pair and the fourth pair and the support member is longer than a distance between each piezoresistive element of the first pair and the second pair and the support member. Each gauge resistor includes a combined resistance, which is provided by serially connecting two corresponding piezoresistive elements. The two corresponding piezoresistive elements have a same resistance value change direction.

主权项

1. A pressure sensor comprising:
a sensor section having one direction as a longitudinal direction, one end in the longitudinal direction as a fixed end, and the other end as a free end opposite to the one end, and including a thin diaphragm and a plurality of piezoresistive elements that is disposed on the diaphragm to provide a bridge circuit; and a support member that fixes the one end of the sensor section, wherein the diaphragm has a shape having a first side of an outer contour line that orthogonally intersects the longitudinal direction, wherein the first side is disposed on an one end side, and wherein the plurality of piezoresistive elements are disposed in a predetermined region other than a region around a middle point of the first side of the diaphragm.