Chips with hermetically sealed but openable chambers

摘要

Embodiments generally relate to chips containing one or more hermetically sealed chambers that may be dismantled under controlled conditions using a release technique. In one embodiment a chip comprises a first hermetic seal bonding first and second elements to create a first chamber and a second hermetic seal bonding third and fourth elements to create a second chamber encompassing the first chamber. The first hermetic seal may be broken open independently of the second hermetic seal by the application of a mechanical or thermal technique.

主权项

1. A chip comprising:
a first hermetic seal bonding a first element and a second element to create a first chamber; and a second hermetic seal bonding a third element and a fourth element to create a second chamber encompassing the first chamber; wherein the first hermetic seal may be broken open independently of the second hermetic seal by the application of a mechanical or thermal technique.