| 发明名称 |
Carrier for semiconductor wafers being processed, has several receptacle devices for receiving semiconductor wafers and arranged in parallel with one another |
| 摘要 |
Carrier for holding semiconductor wafers being processed, has several receptacle devices (3) for holding the semiconductor wafers (2). The receptacle devices (3) form flat edge pieces encircling the semiconductor wafers.
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| 申请公布号 |
DE10021666(A1) |
申请公布日期 |
2001.11.08 |
| 申请号 |
DE20001021666 |
申请日期 |
2000.05.04 |
| 申请人 |
ATMEL GERMANY GMBH |
发明人 |
VOIGT, ANDREAS |
| 分类号 |
H01L21/673;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/673 |
| 代理机构 |
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代理人 |
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