Wafer support plate for supporting a wafer during the process of producing a semi-conductor identifies a wafer's position on the support plate during heat treatment while detecting the wafer's correct position on the plate.

摘要

A wafer support plate (10) for a TRACK system has a support plate body, six carrying supports (30) on the support plate body to hold a wafer and six laser emitter-detector measuring devices (231-236), each of which fits alongside a carrying support and inside the area encompassed by the carrying supports on the support plate.