| 摘要 |
PROBLEM TO BE SOLVED: To automatically inspect a pattern by transmitted light, without recognizing it erroneously, even when a layer having fine unevenness such as an adhesive layer is formed on a substrate. SOLUTION: A TAB tape 5 is fed from a feed reel 11, and is applied with a liquid such as water and alcohol in a liquid applying part 2 to be conveyed to an inspection part 1. In the inspection part 1, the TAB tape 5 is irradiated with an illumination light from a transmission illumination means 1a, the light transmitted through the pattern of an inspection object in the TAB tape 5 is input into an image receiving means 1b, and the pattern formed in the TAB tape 5 is image-picked up. The pattern imaged by the image receiving means 1b is transmitted to a control part 4 to be image-processed, and the processed image is compared with a master pattern for inspection to determine quality. An image having no spot and no unevenness caused by irregular reflection is obtained, because the pattern is image-picked up under the condition where the liquid is applied on the adhesive layer of the TAB tape 5. COPYRIGHT: (C)2005,JPO&NCIPI
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