| 摘要 |
An inspecting apparatus includes an illuminating optical system which irradiates irradiation light onto an object to be inspected, an object placing stage which moves the object along a first direction, an accumulative sensor which converts a transmitted image of the object into an electric signal, a sensor drive unit which moves the accumulative sensor in the irradiation direction and a second direction crossing the first direction, a moving amount detecting unit which detects a moving amount of the object placing stage in the second direction, a control unit which controls a drive amount of the sensor drive unit in the second direction on the basis of the moving amount in the second direction detected by the moving amount detecting unit, and a data comparing unit which compares the transmitted image data of the object with a reference data to detect a defect of the object.
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