发明名称 Dual tip atomic force microscopy probe and method for producing such a probe
摘要 <p>The present invention is related to an Atomic Force Microscopy probe, comprising a tip configuration (3) with two probe tips (7,8) on one cantilever arm (2), said probe tips being electrically isolated from each other and having essentially the same height with respect to the cantilever arm, characterized in that the outer surface of the tip configuration (3) has the shape of a body with a base plane and an apex, the body being divided into two sub-parts (5,6) by a gap (4) located essentially symmetrically with respect to the apex and which gap is essentially perpendicular to the base plane. The invention is equally related to methods for producing such an AFM probe.</p>
申请公布号 EP1748447(A1) 申请公布日期 2007.01.31
申请号 EP20050447195 申请日期 2005.08.30
申请人 INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM ( IMEC) 发明人 FOUCHIER, MARC
分类号 G01Q60/24;G01Q60/30;G01Q60/38;G01Q70/10 主分类号 G01Q60/24
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