发明名称 |
METHOD FOR STRUCTURING AT LEAST ONE LAYER AND ELECTRIC COMPONENT WITH STRUCTURES FROM SAID LAYER |
摘要 |
A process for structuring at least one layer as well as an electrical component with structures from the layer are described. The invention states a process to generate at least one structured layer (10A), wherein a mask structure (20) with a first (20A) and second structure (20B) is generated on a layer (10) which is present on a substrate (5). Through this mask structure (20), the first layer (20A) is transferred onto the layer (10) using isotropic structuring processes, and the second structure (20B) is transferred onto the layer (10) using anisotropic structuring processes. The process as per the invention permits the generation of two structures (20A, 20B) in at least a single layer while using a single mask structure. |
申请公布号 |
EP1738404(A2) |
申请公布日期 |
2007.01.03 |
申请号 |
EP20050748572 |
申请日期 |
2005.04.21 |
申请人 |
OSRAM OPTO SEMICONDUCTORS GMBH |
发明人 |
HACKENBERGER, MAJA;VOELKL, JOHANNES;ZEISEL, ROLAND |
分类号 |
H01L21/3213;G03F;H01L21/28;H01L21/311;H01L21/60;H01L33/00;H03H9/25 |
主分类号 |
H01L21/3213 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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