摘要 |
A semiconductor device includes a device isolation structure formed on a semiconductor substrate to define an active region. A first Si-based epitaxial pattern is formed over the active region corresponding to a bit line contact region and a portion of a gate region at both sides adjacent to the bit line contact region. A second Si-based epitaxial layer is formed over the semiconductor substrate which is stepped up on the first Si-based epitaxial pattern. A stepped gate pattern is formed over the stepped second Si-based epitaxial layer. |