LARGE SCALE TRANSPARENT CONDUCTING FILM MANUFACTURING METHOD AND SYSTEM BY ELLIPTICAL ORBIT ELECTRON CYCLOTRON RESONANCE HAVING LINEAR MICROWAVE

摘要

A system and a method for manufacturing a large scale transparent conducting film by an elliptical orbit electron cyclotron resonance having a linear microwave are provided to generate a uniform electromagnetic field ranging within a film width by a linear microwave induction and an elliptical electromagnet. A method for manufacturing a large scale transparent conducting film by an elliptical orbit electron cyclotron resonance having a linear microwave includes the steps of: maintaining a room temperature and a vacuum state in a chamber and transferring a film to be coated via a main drum(10); generating a high density of plasma ions ranging within a large scale by an elliptical orbit electron cyclotron resonance along an electromagnetic field in condition that a microwave and a magnetic field has the same wavelength by a magnetic field of an elliptical shape generated from a rectangular electromagnet of a donut shape and a linear microwave; and forming a transparent metal oxide layer having transparent conductivity on a film in a room temperature condition using a roll to roll method by dissolving a metal ion source provided from a double ejection ring.