| 摘要 |
PROBLEM TO BE SOLVED: To prevent deterioration of vibrator characteristics accompanying adhesion of siloxane gas to the electrode of a piezoelectric vibrating element by preventing diffusion itself of gas from conductive adhesive which holds the piezoelectric vibrating element in a case. SOLUTION: In the piezoelectric vibrator which holds the piezoelectric vibrating element in the case by the conductive adhesive, liquid inorganic material is coated on a surface of the conductive adhesive, and a hardened over-layer is prepared. Liquid glass can be used for the coating material, and aging by outgas from the conductive adhesive can be prevented. Even when a porous coating layer is used, it is effective if the diameter of the molecules is less than a diameter of the outgas molecules. COPYRIGHT: (C)2008,JPO&INPIT
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