| 摘要 |
PROBLEM TO BE SOLVED: To provide an array substrate inspection method to minimize inspection time, prevent increase of processes, reduce the burden on normal devices, and detect an aging defect. SOLUTION: This array substrate inspection method includes: reading electric charge accumulated to a Ccs capacity part arranged to each pixel 4 of an array substrate comprising a gate line 2, a source line 1, a transistor 3, an auxiliary capacity line 5, and the pixel 4; quantitatively measuring the capacity value of the read charge to inspect each pixel 4; performing actual driving to each pixel 4; changing the conditions of the actual driving by predetermined quantity for a short time; calculating the change quantity of the capacity value of the read electric charge based on the change; comparing the calculation results using a correspondence table including the quantity of changed capacity value and the conditions for the actual driving and information whether a defect is visually detected when an aging process is applied after being made into a panel, and determining whether or not each pixel 4 may be defective in the future. COPYRIGHT: (C)2009,JPO&INPIT
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