| 发明名称 | Apparatus and method for pre-baking substrate upstream of process chamber | ||
| 摘要 | A pre-baking apparatus for heating a substrate upstream of a process tool is adapted to be connected to an EFEM (equipment front end module) and includes: a chamber which has a front face with multiple slots arranged in a height direction of the chamber, and which is divided into multiple compartments extending from the multiple slots, respectively, toward a rear end of the chamber for loading and unloading substrates; and a connecting frame for connecting the chamber to the process tool. The multiple compartments are separated from each other by a divider plate and provided with heaters for heating the multiple compartments, and each compartment has a gas injection port for blowing a hot inert gas over the substrate placed therein toward the slot. | ||
| 申请公布号 | US9349620(B2) | 申请公布日期 | 2016.05.24 |
| 申请号 | US201414327134 | 申请日期 | 2014.07.09 |
| 申请人 | ASM IP Holdings B.V. | 发明人 | Kamata Keisuke;Sato Hiroyuki;Furukawahara Kazunori;Suwada Masaei;Okubo Kenkichi;Arai Izumi |
| 分类号 | F26B11/00;H01L21/67;H01L21/677;F27B9/12 | 主分类号 | F26B11/00 |
| 代理机构 | Snell & Wilmer LLP | 代理人 | Snell & Wilmer LLP |
| 主权项 | 1. A pre-baking apparatus for heating a substrate upstream of a process tool, comprising: a chamber which has a front face with multiple slots arranged in a height direction of the chamber, each slot extending from side to side, and which is divided into multiple compartments extending from the multiple slots, respectively, toward a rear end of the chamber for loading and unloading substrates to and from the multiple compartments through the multiple slots, said multiple compartments being separated from each other by a divider plate and provided with heaters for heating the multiple compartments, each compartment having a gas injection port for blowing a hot inert gas over the substrate placed therein toward the slot; and a connecting frame for connecting the chamber to the process tool. | ||
| 地址 | Almere NL | ||