Thin film micromachined gas sensor

摘要

A thin film/MEMS electrochemical gas sensor includes a body having first and second joined subassemblies to form an interior portion of the body, and is composed of a semiconductor material. The body includes at least one opening configured to allow air to pass into the interior portion of the body. A membrane stack is located in the interior of the body, producing an electrical signal that represents a concentration of target gas in the air at the membrane stack. Conductive contacts are configured to provide electrical connection to the membrane stack to access the electrical signal produced by the membrane stack.

主权项

1. A thin film electrochemical target gas sensor, comprising:
a body including a first subassembly and a second subassembly joined to form an interior portion of the body, the body being composed of a semiconductor material and including at least one opening configured to allow air to pass into the interior portion of the body; a membrane stack in the interior portion of the body, including first and second semi-permeable electrically conductive membranes and a proton exchange membrane therebetween that includes composite catalytic electrodes, the membrane stack producing an electrical signal that represents a concentration of the target gas in the air at the membrane stack; a filter film between the opening in the body and the membrane stack, the film being constructed to allow air to pass through to the membrane stack; and conductive contacts configured to provide electrical connection to the membrane stack to access the electrical signal produced by the membrane stack.