发明名称 |
METHOD AND APPARATUS FOR CURING THIN FILMS ON LOW-TEMPERATURE SUBSTRATES AT HIGH SPEEDS |
摘要 |
A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor control module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information. |
申请公布号 |
EP2307929(A4) |
申请公布日期 |
2016.08.03 |
申请号 |
EP20090794843 |
申请日期 |
2009.04.01 |
申请人 |
NCC NANO, LLC |
发明人 |
SCHRODER, KURT, A.;MARTIN, KARL, M.;JACKSON, DOUG, K.;MCCOOL, STEVEN, C. |
分类号 |
G03G19/00 |
主分类号 |
G03G19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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