VAPORIZING SYSTEM

摘要

According to one embodiment, a vaporizing system comprises first and second tanks that can accumulate liquid source and first, second, and third pipes. The first pipe allows first gas to be sent out of the first tank. The second pipe allows second gas to be sent out of the second tank. The third pipe is connected to the first and second pipes and allows the first and second gas to be sent out to an external apparatus. The first tank is placed on an upper side of the second tank in a stacked manner.

主权项

1. A vaporizing system comprising:
a first tank that can accumulate liquid source; a second tank that can accumulate the liquid source; a first pipe to send first gas generated by the liquid source vaporizing in the first tank out of the first tank therethrough; a second pipe to send second gas generated by the liquid source vaporizing in the second tank out of the second tank therethrough; and a third pipe connected to the first and second pipes and to send out the first and second gas to an external apparatus therethrough, wherein the first tank is placed on an upper side of the second tank in a stacked manner.