发明名称 |
POLISHING COMPOSITION AND POLISHING METHOD |
摘要 |
The invention of the present application relates to: a polishing composition comprising water and silica, wherein the silica has a BET specific surface area of 30 m2/g or more and a NMR specific surface area of 10 m2/g or more; and a polishing method using the polishing composition. In the polishing composition according to the invention of the present application, silica to be used is one having a BET specific surface area falling within the above-mentioned range and also having a NMR specific surface area falling within a specified range. Therefore, a high polishing rate can be achieved, and the polishing rate can be maintained even when the polishing composition is used for a long period. |
申请公布号 |
SG11201608128U(A) |
申请公布日期 |
2016.11.29 |
申请号 |
SG11201608128U |
申请日期 |
2015.03.30 |
申请人 |
NITTA HAAS INCORPORATED |
发明人 |
MATSUSHITA, TAKAYUKI;YAMASAKI, TOMOKI |
分类号 |
C09K3/14;B24B37/00;C09G1/02;H01L21/304 |
主分类号 |
C09K3/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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