发明名称 POLISHING COMPOSITION AND POLISHING METHOD
摘要 The invention of the present application relates to: a polishing composition comprising water and silica, wherein the silica has a BET specific surface area of 30 m2/g or more and a NMR specific surface area of 10 m2/g or more; and a polishing method using the polishing composition. In the polishing composition according to the invention of the present application, silica to be used is one having a BET specific surface area falling within the above-mentioned range and also having a NMR specific surface area falling within a specified range. Therefore, a high polishing rate can be achieved, and the polishing rate can be maintained even when the polishing composition is used for a long period.
申请公布号 SG11201608128U(A) 申请公布日期 2016.11.29
申请号 SG11201608128U 申请日期 2015.03.30
申请人 NITTA HAAS INCORPORATED 发明人 MATSUSHITA, TAKAYUKI;YAMASAKI, TOMOKI
分类号 C09K3/14;B24B37/00;C09G1/02;H01L21/304 主分类号 C09K3/14
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