3D-MEMS optical switch

摘要

A 3D-MEMS optical switch, comprising: a collimator array, a PD array, a window glass which covers the PD array and is coated with a partial reflection film, a micro-electro mechanical system (MEMS) micro-mirror, and a core optical switch controller connected to the PD array and the MEMS micro-mirror. The PD array is integrated inside the core optical switch, so that the architecture and the volume of the optical switch are simplified. The window glass which covers the PD array and is coated with a partial reflection film is used to fold an optical path, and some optical signals are transmitted onto the PD array, so that the core optical switch controller adjusts the MEMS micro-mirror according to the optical power of the optical signals detected by the PD array, so as to enable the insertion loss of the 3D-MEMS optical switch to meet a preset attenuation range.

主权项

1. A 3-dimensions micro-electro-mechanic system 3D-MEMS optical switch, comprising: a collimator array, a power detector (PD) array, window glass covering the PD array and partially plated with a reflective film, a micro-electro-mechanic system MEMS micromirror, and a core optical switch controller connected to the PD array and the MEMS micromirror; wherein
the window glass covering the PD array and partially plated with the reflective film is configured to acquire an optical signal from the collimator array, partially reflect the optical signal acquired from the collimator array onto the MEMS micromirror and partially transmit the optical signal acquired from the collimator array onto the PD array, and is further configured to acquire an optical signal reflected by the MEMS micromirror, partially reflect the optical signal reflected by the MEMS micromirror onto the collimator array and partially transmit the optical signal reflected by the MEMS micromirror onto the PD array; the PD array is configured to detect an optical power of the optical signal transmitted onto the PD array; and the core optical switch controller is configured to adjust the MEMS micromirror based on the detected optical power of the optical signal transmitted onto the PD array, to make insertion loss of the 3D-MEMS optical switch meet a preset target attenuation value.