FILLING SYSTEM FOR SPIN COATER COATING CARTRIDGES

摘要

A filling system (10) for filling a coating cartridge (16) of a spin coater includes a pressurized air source (20) and a container (12) connectable with the pressurized air source (20). An air valve (175) is located in an air flow path (AF) between the pressurized air source (20) and the container (12). A fill switch (26) is operatively connected to the air valve (175). A tubing (18) is connectable with the container (12). A movable connection element (55) is connected to the tubing (18). A fluid valve (88) is located in a coating material flow path (CF) between the container (12) and the connection element (55). A stop switch (28) is operatively connected to the fluid valve (88).